22 August 2017 High-precision laser microcutting and laser microdrilling using diffractive beam-splitting and high-precision flexible beam alignment
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High-precision laser micro machining gains more importance in industrial applications every month. Optical systems like the helical optics offer highest quality together with controllable and adjustable drilling geometry, thus as taper angle, aspect ratio and heat effected zone. The helical optics is based on a rotating Dove-prism which is mounted in a hollow shaft engine together with other optical elements like wedge prisms and plane plates. Although the achieved quality can be interpreted as extremely high the low process efficiency is a main reason that this manufacturing technology has only limited demand within the industrial market. The objective of the research studies presented in this paper is to dramatically increase process efficiency as well as process flexibility. During the last years, the average power of commercial ultra-short pulsed laser sources has increased significantly. The efficient utilization of the high average laser power in the field of material processing requires an effective distribution of the laser power onto the work piece. One approach to increase the efficiency is the application of beam splitting devices to enable parallel processing. Multi beam processing is used to parallelize the fabrication of periodic structures as most application only require a partial amount of the emitted ultra-short pulsed laser power. In order to achieve highest flexibility while using multi beam processing the single beams are diverted and re-guided in a way that enables the opportunity to process with each partial beam on locally apart probes or semimanufactures.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
F. Zibner, F. Zibner, C. Fornaroli, C. Fornaroli, J. Holtkamp, J. Holtkamp, Lior Shachaf, Lior Shachaf, Natan Kaplan, Natan Kaplan, A. Gillner, A. Gillner, } "High-precision laser microcutting and laser microdrilling using diffractive beam-splitting and high-precision flexible beam alignment", Proc. SPIE 10377, Optical System Alignment, Tolerancing, and Verification XI, 103770K (22 August 2017); doi: 10.1117/12.2270948; https://doi.org/10.1117/12.2270948


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