22 August 2017 Measurement of low-order aberrations with an autostigmatic microscope
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Abstract
The addition of a piezo-electric focusing stage and phase retrieval algorithms to a compact, adaptable autostigmatic microscope provides for both improved focus sensitivity during optical system alignment as well as the ability to measure low-order aberrations for system qualification. A description of the instrument and initial results are reported.
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William P. Kuhn, William P. Kuhn, } "Measurement of low-order aberrations with an autostigmatic microscope", Proc. SPIE 10377, Optical System Alignment, Tolerancing, and Verification XI, 103770C (22 August 2017); doi: 10.1117/12.2274813; https://doi.org/10.1117/12.2274813
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