Growth and characterization of GaN/AlGaN heterostructures on GaN substrate templates

Lance Hubbard; Nikolaus Dietz; Mark Vernon; Ramon Collazo; Seiji Mita; Ronny Kirste; Zlatko Sitar; Vincent T. Woods

doi:10.1117/12.2274932

10 October 2017 Growth and characterization of GaN/AlGaN heterostructures on GaN substrate templates

Lance Hubbard, Nikolaus Dietz, Mark Vernon, Ramon Collazo, Seiji Mita, Ronny Kirste, Zlatko Sitar, Vincent T. Woods

Proceedings Volume 10378, Sixteenth International Conference on Solid State Lighting and LED-based Illumination Systems; 103780D (2017) https://doi.org/10.1117/12.2274932
Event: SPIE Optical Engineering + Applications, 2017, San Diego, California, United States

Abstract

This contribution will present the structural and optoelectronic properties of GaN/AlGaN heterostructures grown by Metal Organic Chemical Vapor Deposition (MOCVD) on GaN/sapphire templates. The target parameters for the materials heterostructures have been modeled for utilization in Avalanche Photodiode Detector Structures (APD) operating in the near and deep UV region. Optical modeling has improved absorption within the heterojunction as well as maximized light trapping within the device. Electronic modeling has determined the optimal dopant concentrations for maximum impact ionization rate, as well as tolerance to defects and unintentional doping. This application will require advances in the defect densities, surface morphology, and interfaces. Surface morphological and structural properties of GaN/AlGaN heterostructures are analyzed by Atomic Force Microscopy, Raman spectroscopy, and X-ray diffraction. The optoelectronic properties (phonon structures, free carrier concentrations, and carrier mobility) as well as layer thickness information, are determined by Fourier Transform Infrared Reflectance spectroscopy. A correlation of interfacial defects (type and concentration) with microscopic structural properties, surface morphology, and optoelectronic properties (free carrier concentration and high-frequency dielectric function) is discussed.

Citation Download Citation

Lance Hubbard, Nikolaus Dietz, Mark Vernon, Ramon Collazo, Seiji Mita, Ronny Kirste, Zlatko Sitar, and Vincent T. Woods "Growth and characterization of GaN/AlGaN heterostructures on GaN substrate templates", Proc. SPIE 10378, Sixteenth International Conference on Solid State Lighting and LED-based Illumination Systems, 103780D (10 October 2017); https://doi.org/10.1117/12.2274932

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KEYWORDS

Gallium nitride

Avalanche photodetectors

Aluminum nitride

Aluminum

Heterojunctions

Instrument modeling

Metalorganic chemical vapor deposition

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