A Surface Roughness Measurement In The Optical Workshop

Allan Farber; Chaim Koshizky

doi:10.1117/12.951059

5 July 1989 A Surface Roughness Measurement In The Optical Workshop

Allan Farber; Chaim Koshizky;

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Proceedings Volume 1038, 6th Mtg in Israel on Optical Engineering; (1989) https://doi.org/10.1117/12.951059
Event: Sixth Meeting of Optical Engineering in Israel, 1988, Tel Aviv, Israel

Abstract

There is an increased demand for high quality optical components with minimal surface roughness for precision optical systems. As a result, it has become necessary to determine the surface quality using an accurate, quantitative and non-destructive measurement. This has led to considerable efforts to replace stylus methods with non-contact optical methods for surface texture measurements. Several non-contact optical methods have been tried and some of these have been implemented in commercial instruments. One of these methods utilizes the principle of differential interference con-trast. The system theory and implementation are described; results and calculations are presented for polished surfaces.

Citation Download Citation

Allan Farber, Chaim Koshizky, "A Surface Roughness Measurement In The Optical Workshop", Proc. SPIE 1038, 6th Mtg in Israel on Optical Engineering, (5 July 1989); doi: 10.1117/12.951059; https://doi.org/10.1117/12.951059

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