5 July 1989 A Surface Roughness Measurement In The Optical Workshop
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Proceedings Volume 1038, 6th Mtg in Israel on Optical Engineering; (1989) https://doi.org/10.1117/12.951059
Event: Sixth Meeting of Optical Engineering in Israel, 1988, Tel Aviv, Israel
There is an increased demand for high quality optical components with minimal surface roughness for precision optical systems. As a result, it has become necessary to determine the surface quality using an accurate, quantitative and non-destructive measurement. This has led to considerable efforts to replace stylus methods with non-contact optical methods for surface texture measurements. Several non-contact optical methods have been tried and some of these have been implemented in commercial instruments. One of these methods utilizes the principle of differential interference con-trast. The system theory and implementation are described; results and calculations are presented for polished surfaces.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Allan Farber, Allan Farber, Chaim Koshizky, Chaim Koshizky, } "A Surface Roughness Measurement In The Optical Workshop", Proc. SPIE 1038, 6th Mtg in Israel on Optical Engineering, (5 July 1989); doi: 10.1117/12.951059; https://doi.org/10.1117/12.951059

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