5 July 1989 A Surface Roughness Measurement In The Optical Workshop
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Proceedings Volume 1038, 6th Mtg in Israel on Optical Engineering; (1989) https://doi.org/10.1117/12.951059
Event: Sixth Meeting of Optical Engineering in Israel, 1988, Tel Aviv, Israel
Abstract
There is an increased demand for high quality optical components with minimal surface roughness for precision optical systems. As a result, it has become necessary to determine the surface quality using an accurate, quantitative and non-destructive measurement. This has led to considerable efforts to replace stylus methods with non-contact optical methods for surface texture measurements. Several non-contact optical methods have been tried and some of these have been implemented in commercial instruments. One of these methods utilizes the principle of differential interference con-trast. The system theory and implementation are described; results and calculations are presented for polished surfaces.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Allan Farber, Allan Farber, Chaim Koshizky, Chaim Koshizky, } "A Surface Roughness Measurement In The Optical Workshop", Proc. SPIE 1038, 6th Mtg in Israel on Optical Engineering, (5 July 1989); doi: 10.1117/12.951059; https://doi.org/10.1117/12.951059
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