Focus Sensing Optical Profilometer

Andrei Brunfeld; Joseph Shamir; Gregory Toker

doi:10.1117/12.951051

5 July 1989 Focus Sensing Optical Profilometer

Andrei Brunfeld, Joseph Shamir, Gregory Toker

Proceedings Volume 1038, 6th Mtg in Israel on Optical Engineering; (1989) https://doi.org/10.1117/12.951051
Event: Sixth Meeting of Optical Engineering in Israel, 1988, Tel Aviv, Israel

Abstract

A high sensitivity focus sensing configuration is employed in the construction of an accurate optical profilometer. The system is analyzed theoretically and experimental investigation indicates a sensitivity better than 3nm with a linear dynamic range of 50μm. The deteriorating effects of finite apertures and various misalignments are also considered and taken into account for improved measuring procedures.

Citation Download Citation

Andrei Brunfeld, Joseph Shamir, and Gregory Toker "Focus Sensing Optical Profilometer", Proc. SPIE 1038, 6th Mtg in Israel on Optical Engineering, (5 July 1989); https://doi.org/10.1117/12.951051

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