Oxidation of GaAs substrates to enable β-Ga2O3 films for sensors and optoelectronic devices

Howard Mao; Badriyah Alhalaili; Ahmet Kaya; Daniel M. Dryden; Jerry M. Woodall; M. Saif Islam

doi:10.1117/12.2278843

21 September 2017 Oxidation of GaAs substrates to enable β-Ga₂O₃ films for sensors and optoelectronic devices

Howard Mao, Badriyah Alhalaili, Ahmet Kaya, Daniel M. Dryden, Jerry M. Woodall, M. Saif Islam

Proceedings Volume 10381, Wide Bandgap Power Devices and Applications II; 103810B (2017) https://doi.org/10.1117/12.2278843
Event: SPIE Optical Engineering + Applications, 2017, San Diego, California, United States

Abstract

A very simple and inexpensive method for growing β-Ga₂O₃ films by heating GaAs wafers at high temperature in a furnace was found to contribute to large-area, high-quality β-Ga₂O₃ nanoscale thin films as well as nanowires depending on the growth conditions. We present the material characterization results including the optical band gap, Schottky barrier height with metal (gold), field ionization and photoconductance of β-Ga₂O₃ film and nanowires.

Conference Presentation

Citation Download Citation

Howard Mao, Badriyah Alhalaili, Ahmet Kaya, Daniel M. Dryden, Jerry M. Woodall, and M. Saif Islam "Oxidation of GaAs substrates to enable β-Ga₂O₃ films for sensors and optoelectronic devices", Proc. SPIE 10381, Wide Bandgap Power Devices and Applications II, 103810B (21 September 2017); https://doi.org/10.1117/12.2278843

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available