7 September 2017 Intrinsic resolving power of XUV diffraction gratings measured with Fizeau interferometry
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Abstract
We introduce a method for using Fizeau interferometry to measure the intrinsic resolving power of a diffraction grating. This method is more accurate than traditional techniques based on a long-trace profiler (LTP), since it is sensitive to long-distance phase errors not revealed by a d-spacing map. We demonstrate 50,400 resolving power for a mechanically ruled XUV grating from Inprentus, Inc.
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Samuel Gleason, Samuel Gleason, Jonathan Manton, Jonathan Manton, Janet Sheung, Janet Sheung, Taylor Byrum, Taylor Byrum, Cody Jensen, Cody Jensen, Lingyun Jiang, Lingyun Jiang, Joseph Dvorak, Joseph Dvorak, Ignace Jarrige, Ignace Jarrige, Peter Abbamonte, Peter Abbamonte, } "Intrinsic resolving power of XUV diffraction gratings measured with Fizeau interferometry", Proc. SPIE 10385, Advances in Metrology for X-Ray and EUV Optics VII, 1038506 (7 September 2017); doi: 10.1117/12.2272616; https://doi.org/10.1117/12.2272616
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