7 September 2017 X-ray multilayer mid-frequency characterizations using speckle scanning techniques
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Abstract
Determination of multilayer structure was developed so much, but most of studies focused on the relationship between structural imperfections and reflectivity. These imperfections, whether interfacial roughness and interdiffusion or surface feature, measured by grazing X-ray scattering, atomic force microscopy or electric microscopy, reflect relatively high-frequency characteristics. The mid-frequency figure errors were regarded as the main factor to produce large satellite peaks near the focusing spot in the multilayer K-B mirror and were found to produce stripes in the far-field imaging. We report novel method to study mid-frequency interface and layer growth characterizations of multilayer structure using at-wavelength speckle scanning technique. This work is beneficial for matching multilayer manufacture technology to the optimization of beam performances.
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Hui Jiang, Shuai Yan, Dongxu Liang, Naxi Tian, Hua Wang, Aiguo Li, "X-ray multilayer mid-frequency characterizations using speckle scanning techniques", Proc. SPIE 10385, Advances in Metrology for X-Ray and EUV Optics VII, 103850Q (7 September 2017); doi: 10.1117/12.2272194; https://doi.org/10.1117/12.2272194
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