Development of concave-convex imaging mirror system for a compact and achromatic full-field x-ray microscope

Jumpei Yamada; Satoshi Matsuyama; Shuhei Yasuda; Yasuhisa Sano; Yoshiki Kohmura; Makina Yabashi; Tetsuya Ishikawa; Kazuto Yamauchi

doi:10.1117/12.2272904

6 September 2017 Development of concave-convex imaging mirror system for a compact and achromatic full-field x-ray microscope

Jumpei Yamada, Satoshi Matsuyama, Shuhei Yasuda, Yasuhisa Sano, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Author Affiliations +

Proceedings Volume 10386, Advances in X-Ray/EUV Optics and Components XII; 103860C (2017) https://doi.org/10.1117/12.2272904
Event: SPIE Optical Engineering + Applications, 2017, San Diego, California, United States

Abstract

A full-field X-ray microscope utilizing advanced Kirkpatrick–Baez optics, which comprises four concave mirrors, provides high-resolution X-ray images without chromatic aberration. However, a large distance is required between the mirrors and the detector to obtain sufficiently high magnification factor. To achieve reduce this distance, this paper proposes a novel X-ray imaging mirror system consisting of two pairs of concave and convex mirrors, which enables the effective focal length to be decreased by shifting the principal surface. For developing the proposed optics, the mirrors were fabricated with an ion beam figuring system and stitching interferometer, developed by our group, with a peak-to-valley accuracy of ~2 nm. Analysis results indicate that the fabricated mirrors can achieve nearly diffraction-limited imaging performance. We report the mirror fabrication results and the characteristics of the fabricated mirrors.

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Jumpei Yamada, Satoshi Matsuyama, Shuhei Yasuda, Yasuhisa Sano, Yoshiki Kohmura, Makina Yabashi, Tetsuya Ishikawa, and Kazuto Yamauchi "Development of concave-convex imaging mirror system for a compact and achromatic full-field x-ray microscope", Proc. SPIE 10386, Advances in X-Ray/EUV Optics and Components XII, 103860C (6 September 2017); https://doi.org/10.1117/12.2272904

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