To achieve the goal of a high flux density the spot size on the anode of the X-ray tube should be as small as possible with a simultaneous increase of the X-ray power. A risk is the melting of the anode due to weak heat dissipation. At the same time the figure error of the multilayer mirror should be as low as possible. Large figure errors will increase the spot size of the X-ray beam at the sample position.
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Bernd Hasse, Jenss Schmidt-May, Frank Hertlein, Paul Radcliffe, Carsten Michaelsen, "New developments in laboratory-based x-ray sources and optics," Proc. SPIE 10387, Advances in Laboratory-based X-Ray Sources, Optics, and Applications VI, 103870B (23 August 2017);