7 September 2017 PtyNAMi: ptychographic nano-analytical microscope at PETRA III: interferometrically tracking positions for 3D x-ray scanning microscopy using a ball-lens retroreflector
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Abstract
In recent years, ptychography has revolutionized x-ray microscopy in that it is able to overcome the diffraction limit of x-ray optics, pushing the spatial resolution limit down to a few nanometers. However, due to the weak interaction of x rays with matter, the detection of small features inside a sample requires a high coherent fluence on the sample, a high degree of mechanical stability, and a low background signal from the x-ray microscope. The x-ray scanning microscope PtyNAMi at PETRA III is designed for high-spatial-resolution 3D imaging with high sensitivity. The design concept is presented with a special focus on real-time metrology of the sample position during tomographic scanning microscopy.
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Christian G. Schroer, Christian G. Schroer, Martin Seyrich, Martin Seyrich, Maik Kahnt, Maik Kahnt, Stephan Botta, Stephan Botta, Ralph Döhrmann, Ralph Döhrmann, Gerald Falkenberg, Gerald Falkenberg, Jan Garrevoet, Jan Garrevoet, Mikhail Lyubomirskiy, Mikhail Lyubomirskiy, Maria Scholz, Maria Scholz, Andreas Schropp, Andreas Schropp, Felix Wittwer, Felix Wittwer, } "PtyNAMi: ptychographic nano-analytical microscope at PETRA III: interferometrically tracking positions for 3D x-ray scanning microscopy using a ball-lens retroreflector", Proc. SPIE 10389, X-Ray Nanoimaging: Instruments and Methods III, 103890E (7 September 2017); doi: 10.1117/12.2273710; https://doi.org/10.1117/12.2273710
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