SEM/EDX Imaging Techniques And Applications

William D. Stewart; Glenn W. Meyer

doi:10.1117/12.955425

26 August 1977 SEM/EDX Imaging Techniques And Applications

William D. Stewart, Glenn W. Meyer

Proceedings Volume 0104, Multidisciplinary Microscopy; (1977) https://doi.org/10.1117/12.955425
Event: 1977 SPIE/SPSE Technical Symposium East, 1977, Reston, United States

Abstract

The need to determine and display the elemental composition and distribution of elements of small samples from a few millimeters to a few microns has been recognized for some time. However, until recently such analysis was slow and the instrumentation costly. With the advent of energy dispersive spectrometers of improved (150eV) resolution and the introduction of lower cost SEM's ($25,000) which still retain 100 Angstroms resolution or better, the technique of x-ray imaging has become much more wide spread and readily available. This paper describes the various techniques of imaging involved. Samples containing large amounts of hydrocarbons, such as biological samples, have been difficult to analyze because of the low scatter which creates high backgrounds, thereby lowering sensitivity. This problem has been overcome for the most part by two relatively new techniques, the bulk mode analyzer and the low temperature asher. These instruments, when used with the SEM/EDX system, allow one to see and analyze inorganic particles otherwise hidden in a carbon matrix as well as lower the detection limits of homogenous inorganic elements down to the low (10-50) ppm range in organic matrixes. Thereby greatly extending the analytical capa-bility of an already powerful analytical tool.

Citation Download Citation

William D. Stewart and Glenn W. Meyer "SEM/EDX Imaging Techniques And Applications", Proc. SPIE 0104, Multidisciplinary Microscopy, (26 August 1977); https://doi.org/10.1117/12.955425

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