30 August 2017 Flexible thermistors: MCNO films with low resistivity and high TCR deposited on flexible organic sheets by RF magnetron sputtering
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Abstract
Mn-Co-Ni-O (MCNO) flexible thermistors are fabricated on polyethylene terephthalate or polyimide sheets by RF magnetron sputtering method at room temperature. The whole fabricating processes is completed at room temperature. The temperature coefficient of resistance (TCR) is -3.1% and resistivity as low as 110Ωcm at 295K. The bendingstraightening cycle test indicates the flexible MCNO sheet is stable. The temperature sensing test shows the thermistors respond to temperature change rapidly and sensitively. Due to the heat-treat free process, high TCR and moderate resistivity features, the technique we provide here allows a convenient and low cost industrial manufacture of high performance flexible thermistors and wide band infrared detectors.
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Jing Wu, Jing Wu, Zhiming Huang, Zhiming Huang, Lin Jiang, Lin Jiang, Yanqing Gao, Yanqing Gao, Wei Zhou, Wei Zhou, Junhao Chu, Junhao Chu, } "Flexible thermistors: MCNO films with low resistivity and high TCR deposited on flexible organic sheets by RF magnetron sputtering", Proc. SPIE 10403, Infrared Remote Sensing and Instrumentation XXV, 104030C (30 August 2017); doi: 10.1117/12.2273255; https://doi.org/10.1117/12.2273255
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