11 December 2017 Methods for improving the damage performance of fused silica polished by magnetorheological finishing
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Abstract
The laser-induced damage threshold of fused-silica samples processed via magnetorheological finishing is investigated for polishing compounds depending on the type of abrasive material and the post-polishing surface roughness. The effectiveness of laser conditioning is examined using a ramped pre-exposure with the same 351-nm, 3-ns Gaussian pulses. Finally, we examine chemical etching of the surface and correlate the resulting damage threshold to the etching protocol. A combination of etching and laser conditioning is found to improve the damage threshold by a factor of ~3, while maintaining <1-nm surface roughness.
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K. R. P. Kafka, K. R. P. Kafka, B. Hoffman, B. Hoffman, S. Papernov, S. Papernov, M. A. DeMarco, M. A. DeMarco, C. Hall, C. Hall, K. L. Marshall, K. L. Marshall, S. G. Demos, S. G. Demos, } "Methods for improving the damage performance of fused silica polished by magnetorheological finishing", Proc. SPIE 10447, Laser-Induced Damage in Optical Materials 2017, 1044709 (11 December 2017); doi: 10.1117/12.2281479; https://doi.org/10.1117/12.2281479
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