13 November 2017 High LIDT mirrors for 355nm wavelength based on combined ion beam sputtering and glancing angle deposition technique
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Abstract
Laser induced damage of optical coatings has been one of the most important targets during many decades of intensive research. Different techniques were used and explored with the aim to increase the resistance of multilayer systems to laser pulses. In this work, LIDT results of different “base” structures made by ion beam sputtering of Al2O3, SiO2 and their mixtures are presented, and further enhancement possibilities are discussed by applying additional layer structure using higher bandgap material – fluorides and glancing angle deposited SiO2.
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G. Abromavičius, G. Abromavičius, L. Grinevičiūtė, L. Grinevičiūtė, R. Buzelis, R. Buzelis, S. Kičas, S. Kičas, A. Melninkaitis, A. Melninkaitis, E. Pupka, E. Pupka, T. Tolenis, T. Tolenis, } "High LIDT mirrors for 355nm wavelength based on combined ion beam sputtering and glancing angle deposition technique", Proc. SPIE 10447, Laser-Induced Damage in Optical Materials 2017, 1044728 (13 November 2017); doi: 10.1117/12.2280596; https://doi.org/10.1117/12.2280596
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