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16 October 2017 New high-precision deep concave optical surface manufacturing capability
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Proceedings Volume 10448, Optifab 2017; 104480H (2017)
Event: SPIE Optifab, 2017, Rochester, New York, United States
This paper describes the manufacturing steps necessary to manufacture hemispherical concave aspheric mirrors for high- NA systems. The process chain is considered from generation to final figuring and includes metrology testing during the various manufacturing steps. Corning Incorporated has developed this process by taking advantage of recent advances in commercially available Satisloh and QED Technologies equipment. Results are presented on a 100 mm concave radius nearly hemispherical (NA = 0.94) fused silica sphere with a better than 5 nm RMS figure. Part interferometric metrology was obtained on a QED stitching interferometer. Final figure was made possible by the implementation of a high-NA rotational MRF mode recently developed by QED Technologies which is used at Corning Incorporated for production. We also present results from a 75 mm concave radius (NA = 0.88) Corning ULE sphere that was produced using sub-aperture tools from generation to final figuring. This part demonstrates the production chain from blank to finished optics for high-NA concave asphere.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
François Piché, Chris Maloney, Steve VanKerkhove, Chris Supranowicz, Paul Dumas, and Keith Donohue "New high-precision deep concave optical surface manufacturing capability", Proc. SPIE 10448, Optifab 2017, 104480H (16 October 2017); doi: 10.1117/12.2279809;


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