16 October 2017 From optics testing to micro optics testing
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Proceedings Volume 10448, Optifab 2017; 1044819 (2017) https://doi.org/10.1117/12.2279656
Event: SPIE Optifab, 2017, Rochester, New York, United States
Abstract
Testing micro optics, i.e. lenses with dimensions down to 0.1mm and less, with high precision requires a dedicated design of the testing device, taking into account propagation and wave-optical effects. In this paper, we discuss testing methods based on Shack-Hartmann wavefront technology for functional testing in transmission and for the measurement of surface shape in reflection. As a first example of more conventional optics testing, i.e. optics in the millimeter range, we present the measurement of binoculars in transmission, and discuss the measured wave aberrations and imaging quality. By repeating the measurement at different wavelengths, information on chromatic effects is retrieved. A task that is often tackled using Shack-Hartman wavefront sensors is the alignment of collimation optics in front of a light source. In case of a micro-optical collimation unit with a 1/e² beam diameter of ca. 1mm, we need adapted relay optics for suitable beam expansion and well-defined imaging conditions. In this example, we will discuss the alignment process and effects of the relay optics magnification, as well as typical performance data. Oftentimes, micro optics are fabricated not as single pieces, but as mass optics, e.g. by lithographic processes. Thus, in order to reduce tooling and alignment time, an automated test procedure is necessary. We present an approach for the automated testing of wafer- or tray-based micro optics, and discuss transmission and reflection measurement capabilities. Exemplary performance data is shown for a sample type with 30 microns in diameter, where typical repeatabilities of a few nanometers (rms) are reached.
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Christian Brock, Ralf Dorn, Johannes Pfund, "From optics testing to micro optics testing ", Proc. SPIE 10448, Optifab 2017, 1044819 (16 October 2017); doi: 10.1117/12.2279656; https://doi.org/10.1117/12.2279656
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