SUN: A fully automated interferometric test bench aimed at measuring photolithographic grade lenses with a sub nanometer accuracy

R. Bourgois; A. L. Hamy; P. Pourcelot

doi:10.1117/12.2279789

16 October 2017 SUN: A fully automated interferometric test bench aimed at measuring photolithographic grade lenses with a sub nanometer accuracy

R. Bourgois, A. L. Hamy, P. Pourcelot

Author Affiliations +

Proceedings Volume 10448, Optifab 2017; 104481E (2017) https://doi.org/10.1117/12.2279789
Event: SPIE Optifab, 2017, Rochester, New York, United States

Abstract

SUN is a test bench developed by Safran Reosc to measure spherical or aspherical surface errors of litho-grade lenses with sub-nanometer accuracy. SUN provides full aperture high resolution interferometric measurements. Measurements are performed at the center of curvature using high precision transmission sphere (TS), and Computer Generated Holograms (CGH) for aspheres, in order to light the surface at normal incidence. SUN can measure lenses with diameter up to 350mm and a radius of curvature varying from 60 to 3000 mm.

Citation Download Citation

R. Bourgois, A. L. Hamy, and P. Pourcelot "SUN: A fully automated interferometric test bench aimed at measuring photolithographic grade lenses with a sub nanometer accuracy", Proc. SPIE 10448, Optifab 2017, 104481E (16 October 2017); https://doi.org/10.1117/12.2279789

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