16 October 2017 An optimized method to calculate error correction capability of tool influence function in frequency domain
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Proceedings Volume 10448, Optifab 2017; 104481Z (2017) https://doi.org/10.1117/12.2279655
Event: SPIE Optifab, 2017, Rochester, New York, United States
Abstract
An optimized method to calculate error correction capability of tool influence function (TIF) in certain polishing conditions will be proposed based on smoothing spectral function. The basic mathematical model for this method will be established in theory. A set of polishing experimental data with rigid conformal tool is used to validate the optimized method. The calculated results can quantitatively indicate error correction capability of TIF for different spatial frequency errors in certain polishing conditions. The comparative analysis with previous method shows that the optimized method is simpler in form and can get the same accuracy results with less calculating time in contrast to previous method.
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Jia Wang, Xi Hou, Yongjian Wan, Chunyan Shi, "An optimized method to calculate error correction capability of tool influence function in frequency domain", Proc. SPIE 10448, Optifab 2017, 104481Z (16 October 2017); doi: 10.1117/12.2279655; https://doi.org/10.1117/12.2279655
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