16 October 2017 Precision lens assembly with alignment turning system
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Proceedings Volume 10448, Optifab 2017; 1044821 (2017) https://doi.org/10.1117/12.2279667
Event: SPIE Optifab, 2017, Rochester, New York, United States
The poker chip assembly with high precision lens barrels is widely applied to ultra-high performance optical system. ITRC applies the poker chip assembly technology to the high numerical aperture objective lenses and lithography projection lenses because of its high efficiency assembly process. In order to achieve high precision lens cell for poker chip assembly, an alignment turning system (ATS) is developed. The ATS includes measurement, alignment and turning modules. The measurement module is equipped with a non-contact displacement sensor (NCDS) and an autocollimator (ACM). The NCDS and ACM are used to measure centration errors of the top and the bottom surface of a lens respectively; then the amount of adjustment of displacement and tilt with respect to the rotational axis of the turning machine for the alignment module can be determined. After measurement, alignment and turning processes on the ATS, the centration error of a lens cell with 200 mm in diameter can be controlled within 10 arcsec. Furthermore, a poker chip assembly lens cell with three sub-cells is demonstrated, each sub-cells are measured and accomplished with alignment and turning processes. The lens assembly test for five times by each three technicians; the average transmission centration error of assembly lens is 12.45 arcsec. The results show that ATS can achieve high assembly efficiency for precision optical systems.
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Cheng-Fang Ho, Cheng-Fang Ho, Chien-Yao Huang, Chien-Yao Huang, Yi-Hao Lin, Yi-Hao Lin, Hui-Jean Kuo, Hui-Jean Kuo, Ching-Hsiang Kuo, Ching-Hsiang Kuo, Wei-Yao Hsu, Wei-Yao Hsu, Fong-Zhi Chen, Fong-Zhi Chen, } "Precision lens assembly with alignment turning system", Proc. SPIE 10448, Optifab 2017, 1044821 (16 October 2017); doi: 10.1117/12.2279667; https://doi.org/10.1117/12.2279667

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