16 October 2017 Enhanced measuring range with aspheric transmission spheres
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Proceedings Volume 10448, Optifab 2017; 1044829 (2017) https://doi.org/10.1117/12.2279776
Event: SPIE Optifab, 2017, Rochester, New York, United States
Abstract
The demands on optical metrology such as Fizeau interferometers increase steadily. Typically, a Fizeau lens design consists exclusively of several spheres. Since there is a growing need for larger measuring ranges as well as higher NA of Fizeau lenses, classical spherical Fizeau lenses increasingly reaching their limits. In this paper, a prototype of an innovative transmission sphere comprising aspheric surfaces is introduced and some results and new findings of the manufacturing and testing are presented.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Möhl, A. Möhl, S. Wickenhagen, S. Wickenhagen, U. Fuchs, U. Fuchs, } "Enhanced measuring range with aspheric transmission spheres", Proc. SPIE 10448, Optifab 2017, 1044829 (16 October 2017); doi: 10.1117/12.2279776; https://doi.org/10.1117/12.2279776
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