13 June 2017 Calibration of areal surface topography measuring instruments
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Proceedings Volume 10449, Fifth International Conference on Optical and Photonics Engineering; 1044911 (2017) https://doi.org/10.1117/12.2270533
Event: Fifth International Conference on Optical and Photonics Engineering, 2017, Singapore, Singapore
Abstract
The ISO standards which are related to the calibration of areal surface topography measuring instruments are the ISO 25178-6xx series which defines the relevant metrological characteristics for the calibration of different measuring principles and the ISO 25178-7xx series which defines the actual calibration procedures.

As the field of areal measurement is however not yet fully standardized, there are still open questions to be addressed which are subject to current research. Based on this, selected research results of the authors in this area are presented. This includes the design and fabrication of areal material measures. For this topic, two examples are presented with the direct laser writing of a stepless material measure for the calibration of the height axis which is based on the Abbott- Curve and the manufacturing of a Siemens star for the determination of the lateral resolution limit.

Based on these results, as well a new definition for the resolution criterion, the small scale fidelity, which is still under discussion, is presented. Additionally, a software solution for automated calibration procedures is outlined.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. Seewig, J. Seewig, M. Eifler, M. Eifler, } "Calibration of areal surface topography measuring instruments", Proc. SPIE 10449, Fifth International Conference on Optical and Photonics Engineering, 1044911 (13 June 2017); doi: 10.1117/12.2270533; https://doi.org/10.1117/12.2270533
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