16 October 2017 Key components development progress updates of the 250W high power LPP-EUV light source
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Abstract
Gigaphoton Inc. is developing a CO2-Sn-LPP EUV light source based on unique and original technologies including a high power CO2laser with 15 nanosecond pulse duration, a solid-state pre-pulse laser with 10 picosecond pulse duration, a highly stabilized droplet generator, a precise laser-droplet shooting control system and a debris mitigation system using a magnetic field. In this paper, an update of the development progress of our 250W CO2-Sn-LPP EUV light source and of the key components is presented.
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Takayuki Yabu, Takayuki Yabu, Yasufumi Kawasuji, Yasufumi Kawasuji, Tsukasa Hori, Tsukasa Hori, Takeshi Okamoto, Takeshi Okamoto, Hiroshi Tanaka, Hiroshi Tanaka, Kenichi Miyao, Kenichi Miyao, Takuya Ishii, Takuya Ishii, Yukio Watanabe, Yukio Watanabe, Tatsuya Yanagida, Tatsuya Yanagida, Yutaka Shiraishi, Yutaka Shiraishi, Tamotsu Abe, Tamotsu Abe, Takeshi Kodama, Takeshi Kodama, Hiroaki Nakarai, Hiroaki Nakarai, Taku Yamazaki, Taku Yamazaki, Noritoshi Itou, Noritoshi Itou, Takashi Saito, Takashi Saito, Hakaru Mizoguchi, Hakaru Mizoguchi, } "Key components development progress updates of the 250W high power LPP-EUV light source", Proc. SPIE 10450, International Conference on Extreme Ultraviolet Lithography 2017, 104501C (16 October 2017); doi: 10.1117/12.2280503; https://doi.org/10.1117/12.2280503
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