Presentation + Paper
31 October 2017 Full-chip GPU-accelerated curvilinear EUV dose and shape correction
Author Affiliations +
Abstract
With both 193i multiple patterning and EUV technologies, the constraints on the mask manufacturability are becoming increasingly stringent. The necessity for understanding curvilinear shapes implicitly in design (for ILT and EUV) or OPC correction (corner-rounding effects) along with new multi-beam mask writing systems mean the mask manufacturers are at an inflection point: whether the mask shapes are described as curvilinear targets or complex rectilinear targets, the actual mask shapes after exposure are curvilinear and must be accounted for correctly for wafer lithography. We present a GPU-accelerated intrinsically curvilinear mask data preparation system, compatible with both VSB and multi-beam systems, that is capable of full-ship simultaneous shape and dose correction using arbitrary (non-Gaussian) kernels for model shape and dose effects.
Conference Presentation
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ryan Pearman, Abhishek Shendre, Oleg Syrel, Harold Zable, Ali Bouaricha , Mariusz Niewczas , Bo Su , Leo Pang , and Aki Fujimura "Full-chip GPU-accelerated curvilinear EUV dose and shape correction", Proc. SPIE 10451, Photomask Technology 2017, 1045108 (31 October 2017); https://doi.org/10.1117/12.2281686
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Extreme ultraviolet

Photomasks

Data modeling

Point spread functions

Vestigial sideband modulation

Extreme ultraviolet lithography

Raster graphics

RELATED CONTENT

Layout compensation for EUV flare
Proceedings of SPIE (May 06 2005)
Comprehensive EUV lithography model
Proceedings of SPIE (March 29 2011)
Accurate models for EUV lithography
Proceedings of SPIE (September 23 2009)

Back to Top