16 October 2017 Fabrication of cylindrical micro-parts using synchronous rotary scan-projection lithography and chemical etching
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Abstract
Lithographical patterning on the surface of a fine pipe with a thin wall is required for fabricating three-dimensional micro-parts. For this reason, a new exposure system was developed for printing patterns on a cylindrical pipe. In the exposure system, the pipe was rotated 360° synchronous to a linear scan of a reticle. Stent-like resist patterns with a mean width of 185 μm were printed on a surface of stainless-steel pipe 2 mm in diameter. Next, the patterned pipe was chemically etched and stent-like meshed pipes with a mean mesh width of 110 μm were fabricated.
Conference Presentation
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Kaiki Ito, Kaiki Ito, Yuta Suzuki, Yuta Suzuki, Toshiyuki Horiuchi, Toshiyuki Horiuchi, } "Fabrication of cylindrical micro-parts using synchronous rotary scan-projection lithography and chemical etching", Proc. SPIE 10451, Photomask Technology, 104510G (16 October 2017); doi: 10.1117/12.2284735; https://doi.org/10.1117/12.2284735
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