Advanced process control based on litho-patterning density

Yuping Ren; Guoxiang Ning; Wenchao Jiang; Xiang Hu; Lloyd Litt; Paul Ackmann

doi:10.1117/12.2280570

16 October 2017 Advanced process control based on litho-patterning density

Yuping Ren, Guoxiang Ning, Wenchao Jiang, Xiang Hu, Lloyd Litt, Paul Ackmann

Proceedings Volume 10451, Photomask Technology 2017; 104511M (2017) https://doi.org/10.1117/12.2280570
Event: SPIE Photomask Technology and EUV Lithography, 2017, Monterey, California, United States

Abstract

One of the major challenges for process control is wafer to wafer and lot to lot variation, for the 14nm technology node and beyond. Most of advanced process control (APC) is based on product groups, and different product groups exhibit different amounts of parameter tuning. Because lithography pattern density varies between product groups, it is difficult or impossible to share APC threads between different product groups. This paper will introduce a new method to optimize current APC into a dynamic control. With dynamic control, product groups having different pattern density will have a similar amount of parameter tuning and all product groups could share APC feedback. This paper also shows the simulation results and predicts CD sigma with dynamic control.

Citation Download Citation

Yuping Ren, Guoxiang Ning, Wenchao Jiang, Xiang Hu, Lloyd Litt, and Paul Ackmann "Advanced process control based on litho-patterning density ", Proc. SPIE 10451, Photomask Technology 2017, 104511M (16 October 2017); https://doi.org/10.1117/12.2280570

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available