13 July 2017 MTO-like reference mask modeling for advanced inverse lithography technology patterns
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Abstract
Advanced Inverse Lithography Technology (ILT) can result in mask post-OPC databases with very small address units, all-angle figures, and very high vertex counts. This creates mask inspection issues for existing mask inspection database rendering. These issues include: large data volumes, low transfer rate, long data preparation times, slow inspection throughput, and marginal rendering accuracy leading to high false detections. This paper demonstrates the application of a new rendering method including a new OASIS-like mask inspection format, new high-speed rendering algorithms, and related hardware to meet the inspection challenges posed by Advanced ILT masks.
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Jongju Park, Jongju Park, Jongin Moon, Jongin Moon, Suein Son, Suein Son, Donghoon Chung, Donghoon Chung, Byung-Gook Kim, Byung-Gook Kim, Chan-Uk Jeon, Chan-Uk Jeon, Patrick LoPresti, Patrick LoPresti, Shan Xue, Shan Xue, Sonny Wang, Sonny Wang, Bill Broadbent, Bill Broadbent, Soonho Kim, Soonho Kim, Jiuk Hur, Jiuk Hur, Min Choo, Min Choo, } "MTO-like reference mask modeling for advanced inverse lithography technology patterns", Proc. SPIE 10454, Photomask Japan 2017: XXIV Symposium on Photomask and Next-Generation Lithography Mask Technology, 104540J (13 July 2017); doi: 10.1117/12.2282406; https://doi.org/10.1117/12.2282406
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