Investigation of the influence of the proximity effect and randomness on a photolithographically fabricated photonic crystal nanobeam cavity

Tomohiro Tetsumoto; Hajime Kumazaki; Rammaru Ishida; Takasumi Tanabe

doi:10.1117/12.2283389

2 January 2018 Investigation of the influence of the proximity effect and randomness on a photolithographically fabricated photonic crystal nanobeam cavity

Tomohiro Tetsumoto, Hajime Kumazaki, Rammaru Ishida, Takasumi Tanabe

Author Affiliations +

Proceedings Volume 10456, Nanophotonics Australasia 2017; 104561Y (2018) https://doi.org/10.1117/12.2283389
Event: SPIE Nanophotonics Australasia, 2017, Melbourne, Australia

Abstract

Recent progress on the fabrication techniques used in silicon photonics foundries has enabled us to fabricate photonic crystal (PhC) nanocavities using a complementary metal-oxide-semiconductor (CMOS) compatible process. A high Q two-dimensional PhC nanocavity and a one-dimensional nanobeam PhC cavity with a Q exceeding 100 thousand have been fabricated using ArF excimer laser immersion lithography. These are important steps toward the fusion of silicon photonics devices and PhC devices. Although the fabrication must be reproducible for industrial applications, the properties of PhC nanocavities are sensitively affected by the proximity effect and randomness. In this study, we quantitatively investigated the influence of the proximity effect and randomness on a silicon nanobeam PhC cavity. First, we discussed the optical properties of cavities defined with one- and two-step exposure methods, which revealed the necessity of a multi-stage exposure process for our structure. Then, we investigated the impact of block structures placed next to the cavities. The presence of the blocks modified the resonant wavelength of the cavities by about 10 nm. The highest Q we obtained was over 100 thousand. We also discussed the influence of photomask misalignment, which is also a possible cause of disorders in the photolithographic fabrication process. This study will provide useful information for fabricating integrated photonic circuits with PhC nanocavities using a photolithographic process.

Citation Download Citation

Tomohiro Tetsumoto, Hajime Kumazaki, Rammaru Ishida, and Takasumi Tanabe "Investigation of the influence of the proximity effect and randomness on a photolithographically fabricated photonic crystal nanobeam cavity", Proc. SPIE 10456, Nanophotonics Australasia 2017, 104561Y (2 January 2018); https://doi.org/10.1117/12.2283389

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KEYWORDS

Silicon

Silicon photonics

Silica

Optical properties

Photomasks

Nanolithography

Photonic crystals

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