2 January 2018 Surface smoothening of the inherent roughness of micro-lenses fabricated with 2-photon lithography
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Abstract
Two-photon polymerization by direct laser writing enables to write refractive micro-optical elements with sub-μm precision. The trajectories and layering during the direct writing process often result in roughness in the range of the writing increment, which has adverse effects for optical applications. Instead of increasing overlap between adjacent voxels, roughness in the range of 100 nm can be smoothed out by post-processing. For this a method known as TASTE was developed, which allows polishing of surfaces without changing the structural details or the overall shape. It works particularly well with thermoplastic polymers and enables sub-10 nm roughness. The optical quality was confirmed for an array with several 100 microlenses.
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Helmut Schift, Robert Kirchner, Nachiappan Chidambaram, Mirco Altana, "Surface smoothening of the inherent roughness of micro-lenses fabricated with 2-photon lithography", Proc. SPIE 10456, Nanophotonics Australasia 2017, 104561Z (2 January 2018); doi: 10.1117/12.2283236; https://doi.org/10.1117/12.2283236
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