24 October 2017 Study on on-machine defects measuring system on high power laser optical elements
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Proceedings Volume 10457, AOPC 2017: Laser Components, Systems, and Applications; 104572C (2017) https://doi.org/10.1117/12.2284799
Event: Applied Optics and Photonics China (AOPC2017), 2017, Beijing, China
Abstract
The influence of surface defects on high power laser optical elements will cause some harm to the performances of imaging system, including the energy consumption and the damage of film layer. To further increase surface defects on high power laser optical element, on-machine defects measuring system was investigated. Firstly, the selection and design are completed by the working condition analysis of the on-machine defects detection system. By designing on processing algorithms to realize the classification recognition and evaluation of surface defects. The calibration experiment of the scratch was done by using the self-made standard alignment plate. Finally, the detection and evaluation of surface defects of large diameter semi-cylindrical silicon mirror are realized. The calibration results show that the size deviation is less than 4% that meet the precision requirement of the detection of the defects. Through the detection of images the on-machine defects detection system can realize the accurate identification of surface defects.
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Chi Luo, Chi Luo, Feng Shi, Feng Shi, Zhifan Lin, Zhifan Lin, Tong Zhang, Tong Zhang, Guilin Wang, Guilin Wang, } "Study on on-machine defects measuring system on high power laser optical elements", Proc. SPIE 10457, AOPC 2017: Laser Components, Systems, and Applications, 104572C (24 October 2017); doi: 10.1117/12.2284799; https://doi.org/10.1117/12.2284799
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