24 October 2017 Measurement of steep aspheric surfaces using improved two-wavelength phase-shifting interferometer
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Proceedings Volume 10458, AOPC 2017: 3D Measurement Technology for Intelligent Manufacturing; 104580Z (2017) https://doi.org/10.1117/12.2284306
Event: Applied Optics and Photonics China (AOPC2017), 2017, Beijing, China
Abstract
Optical components with aspheric surfaces can improve the imaging quality of optical systems, and also provide extra advantages such as lighter weight, smaller volume and simper structure. In order to satisfy these performance requirements, the surface error of aspheric surfaces, especially high departure aspheric surfaces must be measured accurately and conveniently. The major obstacle of traditional null-interferometry for aspheric surface under test is that specific and complex null optics need to be designed to fully compensate for the normal aberration of the aspheric surface under test. However, non-null interferometry partially compensating for the aspheric normal aberration can test aspheric surfaces without specific null optics. In this work, a novel non-null test approach of measuring the deviation between aspheric surfaces and the best reference sphere by using improved two-wavelength phase shifting interferometer is described. With the help of the calibration based on reverse iteration optimization, we can effectively remove the retrace error and thus improve the accuracy. Simulation results demonstrate that this method can measure the aspheric surface with the departure of over tens of microns from the best reference sphere, which introduces approximately 500λ of wavefront aberration at the detector.
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Liqiong Zhang, Liqiong Zhang, Shaopu Wang, Shaopu Wang, Yao Hu, Yao Hu, Qun Hao, Qun Hao, } "Measurement of steep aspheric surfaces using improved two-wavelength phase-shifting interferometer", Proc. SPIE 10458, AOPC 2017: 3D Measurement Technology for Intelligent Manufacturing, 104580Z (24 October 2017); doi: 10.1117/12.2284306; https://doi.org/10.1117/12.2284306
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