Digital Moiré based transient interferometry and its application in optical surface measurement

Qun Hao; Yifeng Tan; Shaopu Wang; Yao Hu

doi:10.1117/12.2285354

24 October 2017 Digital Moiré based transient interferometry and its application in optical surface measurement

Qun Hao, Yifeng Tan, Shaopu Wang, Yao Hu

Proceedings Volume 10458, AOPC 2017: 3D Measurement Technology for Intelligent Manufacturing; 104581E (2017) https://doi.org/10.1117/12.2285354
Event: Applied Optics and Photonics China (AOPC2017), 2017, Beijing, China

Abstract

Digital Moiré based transient interferometry (DMTI) is an effective non-contact testing methods for optical surfaces. In DMTI system, only one frame of real interferogram is experimentally captured for the transient measurement of the surface under test (SUT). When combined with partial compensation interferometry (PCI), DMTI is especially appropriate for the measurement of aspheres with large apertures, large asphericity or different surface parameters. Residual wavefront is allowed in PCI, so the same partial compensator can be applied to the detection of multiple SUTs. Excessive residual wavefront aberration results in spectrum aliasing, and the dynamic range of DMTI is limited. In order to solve this problem, a method based on wavelet transform is proposed to extract phase from the fringe pattern with spectrum aliasing. Results of simulation demonstrate the validity of this method. The dynamic range of Digital Moiré technology is effectively expanded, which makes DMTI prospective in surface figure error measurement for intelligent fabrication of aspheric surfaces.

Citation Download Citation

Qun Hao, Yifeng Tan, Shaopu Wang, and Yao Hu "Digital Moiré based transient interferometry and its application in optical surface measurement", Proc. SPIE 10458, AOPC 2017: 3D Measurement Technology for Intelligent Manufacturing, 104581E (24 October 2017); https://doi.org/10.1117/12.2285354

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