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24 October 2017 A new linear structured light module based on the MEMS micromirror
Peng Zhou, Wenjiang Shen, Huijun Yu
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Proceedings Volume 10458, AOPC 2017: 3D Measurement Technology for Intelligent Manufacturing; 104581H (2017) https://doi.org/10.1117/12.2285455
Event: Applied Optics and Photonics China (AOPC2017), 2017, Beijing, China
Abstract
A new linear structured light module based on the Micro-Electro-Mechanical System (MEMS) two-dimensional scanning micromirror was designed and created. This module consists of a laser diode, a convex lens, and the MEMS micromirror. The laser diode generates the light and the convex lens control the laser beam to converge on a single point with large depth of focus. The fast scan in horizontal direction of the micromirror will turn the laser spot into a homogenous laser line. Meanwhile, the slow scan in vertical direction of the micromirror will move the laser line in the vertical direction. The width of the line generated by this module is 300μm and the length is 120mm and the moving distance is 100mm at 30cm away from the module. It will promote the development of industrial detection.
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Peng Zhou, Wenjiang Shen, and Huijun Yu "A new linear structured light module based on the MEMS micromirror", Proc. SPIE 10458, AOPC 2017: 3D Measurement Technology for Intelligent Manufacturing, 104581H (24 October 2017); https://doi.org/10.1117/12.2285455
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KEYWORDS
Microelectromechanical systems
Micromirrors
3D metrology
3D vision
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