24 October 2017 Calibration of misalignment errors in the non-null interferometry based on reverse iteration optimization algorithm
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Proceedings Volume 10458, AOPC 2017: 3D Measurement Technology for Intelligent Manufacturing; 104581M (2017) https://doi.org/10.1117/12.2285602
Event: Applied Optics and Photonics China (AOPC2017), 2017, Beijing, China
Abstract
With no necessity of compensating the whole aberration introduced by the aspheric surfaces, non-null test has the advantage over null test in applicability. However, retrace error, which is brought by the path difference between the rays reflected from the surface under test (SUT) and the incident rays, is introduced into the measurement and makes up of the residual wavefront aberrations (RWAs) along with surface figure error (SFE), misalignment error and other influences. Being difficult to separate from RWAs, the misalignment error may remain after measurement and it is hard to identify whether it is removed or not. It is a primary task to study the removal of misalignment error. A brief demonstration of digital Moiré interferometric technique is presented and a calibration method for misalignment error on the basis of reverse iteration optimization (RIO) algorithm in non-null test method is addressed. The proposed method operates mostly in the virtual system, and requires no accurate adjustment in the real interferometer, which is of significant advantage in reducing the errors brought by repeating complicated manual adjustment, furthermore improving the accuracy of the aspheric surface test. Simulation verification is done in this paper. The calibration accuracy of the position and attitude can achieve at least a magnitude of 10-5 mm and 0.0056×10-6rad, respectively. The simulation demonstrates that the influence of misalignment error can be precisely calculated and removed after calibration.
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Xinmu Zhang, Xinmu Zhang, Qun Hao, Qun Hao, Yao Hu, Yao Hu, Shaopu Wang, Shaopu Wang, Yan Ning, Yan Ning, Tengfei Li, Tengfei Li, Shufen Chen, Shufen Chen, } "Calibration of misalignment errors in the non-null interferometry based on reverse iteration optimization algorithm ", Proc. SPIE 10458, AOPC 2017: 3D Measurement Technology for Intelligent Manufacturing, 104581M (24 October 2017); doi: 10.1117/12.2285602; https://doi.org/10.1117/12.2285602
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