High performance VO2 thin films fabricated by room-temperature reactive magnetron sputtering and rapid thermal annealing

Yongjun Zhan; Xiudi Xiao; Yuan Lu; Ziyi Cao; Haoliang Cheng; Jifu Shi; Gang Xu

doi:10.1117/12.2284110

24 October 2017 High performance VO₂ thin films fabricated by room-temperature reactive magnetron sputtering and rapid thermal annealing

Yongjun Zhan, Xiudi Xiao, Yuan Lu, Ziyi Cao, Haoliang Cheng, Jifu Shi, Gang Xu

Author Affiliations +

Proceedings Volume 10460, AOPC 2017: Optoelectronics and Micro/Nano-Optics; 104600R (2017) https://doi.org/10.1117/12.2284110
Event: Applied Optics and Photonics China (AOPC2017), 2017, Beijing, China

Abstract

The VOx thin films are successfully prepared on glass substrate by reactive magnetron sputtering at room-temperature, and subsequently annealed by rapid thermal annealing system in N₂ from 0.5Pa to 10000Pa. The effects of annealing pressure on the optical performance and phase transition temperature (T_c) of VOx thin films are systematically investigated. The results show that the VOx thin films exhibit good performance with T_lum of 28.17%, ΔT_sol of 12.69%, and T_c of 42. The annealing pressure had an obvious influence on the grain size, which can be attributed to light scattering effects by gas molecule. Compared with oxygen vacancy defects, the grain size plays a decisive role in the regulation of T_c. The restricting the growth of grain can be reduced the T_c, and a little deterioration effect on optical performance can be observed. In addition, the method in this paper not only depressed the T_c, but also simplified the process and improved efficiency, which will provide guidance for the preparation and application of VO_x thin films.

Citation Download Citation

Yongjun Zhan, Xiudi Xiao, Yuan Lu, Ziyi Cao, Haoliang Cheng, Jifu Shi, and Gang Xu "High performance VO₂ thin films fabricated by room-temperature reactive magnetron sputtering and rapid thermal annealing", Proc. SPIE 10460, AOPC 2017: Optoelectronics and Micro/Nano-Optics, 104600R (24 October 2017); https://doi.org/10.1117/12.2284110

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