24 October 2017 High-precision processing and detection of the high-caliber off-axis aspheric mirror
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Proceedings Volume 10463, AOPC 2017: Space Optics and Earth Imaging and Space Navigation; 104631E (2017) https://doi.org/10.1117/12.2285377
Event: Applied Optics and Photonics China (AOPC2017), 2017, Beijing, China
Abstract
To achieve the efficient, controllable, digital processing and high-precision detection of the high-caliber off-axis aspheric mirror, meeting the high-level development needs of the modern high-resolution, large field of space optical remote sensing camera, we carried out the research on high precision machining and testing technology of off-axis aspheric mirror. First, we forming the off-axis aspheric sample with diameter of 574mm × 302mm by milling it with milling machine, and then the intelligent robot equipment was used for off-axis aspheric high precision polishing. Surface detection of the sample will be proceed with the off-axis aspheric contact contour detection technology and offaxis non-spherical surface interference detection technology after its fine polishing using ion beam equipment. The final surface accuracy RMS is 12nm.
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Chen Dai, Ang Li, Lingdi Xu, Yingjie Zhang, "High-precision processing and detection of the high-caliber off-axis aspheric mirror", Proc. SPIE 10463, AOPC 2017: Space Optics and Earth Imaging and Space Navigation, 104631E (24 October 2017); doi: 10.1117/12.2285377; https://doi.org/10.1117/12.2285377
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