Analysis Of Diamond-Turned Optics Using Ellipsometry

S. F. Nee.; H E Bennett; D L Decker; S. D Greene; A A. Ogloza

doi:10.1117/12.951364

11 July 1989 Analysis Of Diamond-Turned Optics Using Ellipsometry

S. F. Nee., H E Bennett, D L Decker, S. D Greene, A A. Ogloza

Proceedings Volume 1047, Mirrors and Windows for High Power/High Energy Laser Systems; (1989) https://doi.org/10.1117/12.951364
Event: OE/LASE '89, 1989, Los Angeles, CA, United States

Abstract

Ellipsometric data for several diamond-turned samples were measured at a wavelength of 5Ã‚Âµm and at multiple angles of incidence. These data were reduced by the least-square-fit programs for different models to obtain the corresponding best-fit parameters. Calculations from the three-dimensional anisotropic model for diamond-turned surfaces show that the ellipsometric parameters are not sensitive to the sample orientation for parallel depolarization factors smaller than 0.03. The best-fit results for different models are compared and discussed. A special model for two-dimensional symmetric rough layers can give rms errors as low as δψ ≤ 0.005° and δΔ ≤ 0.02°; its best-fit parameters agree with the profilometric rms roughness and rms slope.

Citation Download Citation

S. F. Nee., H E Bennett, D L Decker, S. D Greene, and A A. Ogloza "Analysis Of Diamond-Turned Optics Using Ellipsometry", Proc. SPIE 1047, Mirrors and Windows for High Power/High Energy Laser Systems, (11 July 1989); https://doi.org/10.1117/12.951364

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