Paper
23 February 2018 Round robin test on V-shape bio-imaging transfer standard for determination of the instrument transfer function of 3D optical profilers
Carlos Bermudez, Roger Artigas, Pol Martinez, Anton Nolvi, Miikka Järvinen, Edward Hæggström, Ivan Kassamakov
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Abstract
A V-shape Bio-Transfer-Standard (V-BTS), developed and produced at the University of Helsinki (UH), was measured in two laboratories. In comparison to Siemens Star calibration specimens, the V-BTS performs better at high lateral frequencies close to the diffraction limit of the optical instrument. This permits determining of the Instrument Transfer Function (ITF). The V-BTS features two lipid bilayer steps that partly overlap each other at an angle of 20°, with an average height of 4.6 ± 0.1 nm. The Round Robin (RR) test aims to determine whether the V-BTS and the developed application protocol work with different optical profilers in different laboratories. First the artefact was measured at Sensofar-Tech, S.L. using an S-neox profiler working in Phase Shifting Interferometry mode. Then V-BTS was measured at UH using a custom-built Scanning White Light Interferometer. All measurements done by four different operators at the two laboratories have a range or standard deviation of ±0.1 nm which agrees with the theoretical estimates and with measurements done using an atomic force microscope and with a surface plasmon resonance based instrument. The RR results show the applicability of the V-BTS for calibration and for ITF characterization of 3D optical profilers.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Carlos Bermudez, Roger Artigas, Pol Martinez, Anton Nolvi, Miikka Järvinen, Edward Hæggström, and Ivan Kassamakov "Round robin test on V-shape bio-imaging transfer standard for determination of the instrument transfer function of 3D optical profilers", Proc. SPIE 10499, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXV, 1049923 (23 February 2018); https://doi.org/10.1117/12.2289098
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KEYWORDS
Calibration

Standards development

3D metrology

Stars

Interferometers

Diffraction

Manufacturing

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