Multi-layer integrated photonics from the ultraviolet to the infrared

Cheryl Sorace-Agaskar; Suraj Bramhavar; Dave Kharas; William Loh; Paul W. Juodawlkis; John Chiaverini; Jeremy M. Sage

doi:10.1117/12.2288411

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20 February 2018 Multi-layer integrated photonics from the ultraviolet to the infrared

Cheryl Sorace-Agaskar, Suraj Bramhavar, Dave Kharas, William Loh, Paul W. Juodawlkis, John Chiaverini, Jeremy M. Sage

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Proceedings Volume 10510, Frontiers in Biological Detection: From Nanosensors to Systems X; 105100D (2018) https://doi.org/10.1117/12.2288411
Event: SPIE BiOS, 2018, San Francisco, California, United States

Abstract

We demonstrate a scalable multi-layer integrated photonics platform that operates over a multi-octave wavelength range, from the near-ultraviolet (NUV) to the near-infrared (NIR). The platform is CMOS compatible and consists of silicon nitride (Si₃N₄) and alumina (Al₂O₃) optical waveguides cladded with silicon dioxide (SiO₂). We demonstrate low-loss waveguides and passive components including diffractive vertical grating couplers for input/output (I/O). The multilayer nature of the platform enables complex routing of multiple wavelengths, making it useful for a variety of applications including integrated atomic-molecular-optical (AMO) and biophotonic systems.

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Cheryl Sorace-Agaskar, Suraj Bramhavar, Dave Kharas, William Loh, Paul W. Juodawlkis, John Chiaverini, and Jeremy M. Sage "Multi-layer integrated photonics from the ultraviolet to the infrared", Proc. SPIE 10510, Frontiers in Biological Detection: From Nanosensors to Systems X, 105100D (20 February 2018); https://doi.org/10.1117/12.2288411

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