Chemical sensors fabricated by a photonic integrated circuit foundry

Todd H. Stievater; Kee Koo; Nathan F. Tyndall; Scott A. Holmstrom; Dmitry A. Kozak; Peter G. Goetz; R. Andrew McGill; Marcel W. Pruessner

doi:10.1117/12.2294059

20 February 2018 Chemical sensors fabricated by a photonic integrated circuit foundry

Todd H. Stievater, Kee Koo, Nathan F. Tyndall, Scott A. Holmstrom, Dmitry A. Kozak, Peter G. Goetz, R. Andrew McGill, Marcel W. Pruessner

Author Affiliations +

Proceedings Volume 10510, Frontiers in Biological Detection: From Nanosensors to Systems X; 105100I (2018) https://doi.org/10.1117/12.2294059
Event: SPIE BiOS, 2018, San Francisco, California, United States

Abstract

We describe the detection of trace concentrations of chemical agents using waveguide-enhanced Raman spectroscopy in a photonic integrated circuit fabricated by AIM Photonics. The photonic integrated circuit is based on a five-centimeter long silicon nitride waveguide with a trench etched in the top cladding to allow access to the evanescent field of the propagating mode by analyte molecules. This waveguide transducer is coated with a sorbent polymer to enhance detection sensitivity and placed between low-loss edge couplers. The photonic integrated circuit is laid-out using the AIM Photonics Process Design Kit and fabricated on a Multi-Project Wafer. We detect chemical warfare agent simulants at sub parts-per-million levels in times of less than a minute. We also discuss anticipated improvements in the level of integration for photonic chemical sensors, as well as existing challenges.

Citation Download Citation

Todd H. Stievater, Kee Koo, Nathan F. Tyndall, Scott A. Holmstrom, Dmitry A. Kozak, Peter G. Goetz, R. Andrew McGill, and Marcel W. Pruessner "Chemical sensors fabricated by a photonic integrated circuit foundry", Proc. SPIE 10510, Frontiers in Biological Detection: From Nanosensors to Systems X, 105100I (20 February 2018); https://doi.org/10.1117/12.2294059

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