20 February 2018 Chemical sensors fabricated by a photonic integrated circuit foundry
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We describe the detection of trace concentrations of chemical agents using waveguide-enhanced Raman spectroscopy in a photonic integrated circuit fabricated by AIM Photonics. The photonic integrated circuit is based on a five-centimeter long silicon nitride waveguide with a trench etched in the top cladding to allow access to the evanescent field of the propagating mode by analyte molecules. This waveguide transducer is coated with a sorbent polymer to enhance detection sensitivity and placed between low-loss edge couplers. The photonic integrated circuit is laid-out using the AIM Photonics Process Design Kit and fabricated on a Multi-Project Wafer. We detect chemical warfare agent simulants at sub parts-per-million levels in times of less than a minute. We also discuss anticipated improvements in the level of integration for photonic chemical sensors, as well as existing challenges.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Todd H. Stievater, Todd H. Stievater, Kee Koo, Kee Koo, Nathan F. Tyndall, Nathan F. Tyndall, Scott A. Holmstrom, Scott A. Holmstrom, Dmitry A. Kozak, Dmitry A. Kozak, Peter G. Goetz, Peter G. Goetz, R. Andrew McGill, R. Andrew McGill, Marcel W. Pruessner, Marcel W. Pruessner, } "Chemical sensors fabricated by a photonic integrated circuit foundry", Proc. SPIE 10510, Frontiers in Biological Detection: From Nanosensors to Systems X, 105100I (20 February 2018); doi: 10.1117/12.2294059; https://doi.org/10.1117/12.2294059

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