15 February 2018 Improvement of conversion efficiency of DUV light generation at 221-nm using CLBO crystal
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Abstract
We are developing a 100-W level DUV light source using a solid-state seed laser and an ArF amplifier. Seed pulse at 193nm is generated by the sum frequency mixing of the pulse at 221nm and the pulse at 1553nm using CLBO crystals. To realize a compact and robust seed laser, we improved the conversion efficiency of DUV light generation. In case of the 221nm pulse generation, the conversion efficiency was increased from 22% to nearly 50% by optimizing the conversion process which enables the reduction of amplifier unit of fundamental light source to obtain the 1W seed pulse at 193nm.
Conference Presentation
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hironori Igarashi, Hironori Igarashi, Zhigang Zhao, Zhigang Zhao, Hongwen Xuan, Hongwen Xuan, Chen Qu, Chen Qu, Shinji Ito, Shinji Ito, Yuki Tamaru, Yuki Tamaru, Mitsuru Tamiya, Mitsuru Tamiya, Taisuke Miura, Taisuke Miura, Junichi Fujimoto, Junichi Fujimoto, Hakaru Mizoguchi, Hakaru Mizoguchi, Yohei Kobayashi, Yohei Kobayashi, } "Improvement of conversion efficiency of DUV light generation at 221-nm using CLBO crystal", Proc. SPIE 10516, Nonlinear Frequency Generation and Conversion: Materials and Devices XVII, 1051602 (15 February 2018); doi: 10.1117/12.2287675; https://doi.org/10.1117/12.2287675
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