20 February 2018 Ultra-short pulse fiber beam delivery in micromachining applications
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Abstract
Fiber beam delivery of high power pico- and femtosecond pulses offers many advantages in industrial application. This includes flexible beam delivery, easy integration into machines and production environment as well as laser safety and robustness. Using micro-structured hollow core fibers nearly single mode transmission of ultra-short pulses with excellent beam quality can be achieved over several meters and has been reported in numerous publications during the last couple of years. Laser light cables and beam delivery systems with these fibers are now available and capable of delivering pulses of several 100 μJ with 90% transmission over 10 m long fibers while maintaining excellent beam quality (M2 1.2 - 1.4). For successful industrial application, several additional factors need to be taken into account. This includes system robustness against changing laser input parameters as the output of a laser source can change, robustness against fiber bending in applications with dynamically moved fiber as well as operation free of maintenance and realignment. In order to address these, the relevant effects impacting the performance of fiber delivered laser pulses have been studied. We will report experimental results of fiber bending effects on beam parameters critical for micromachining applications and analyze the influence of laser to fiber coupling. In addition, micromachining applications employing a modular fiber beam delivery system will be shown and the impact of induced beam parameter changes on the micromachining process discussed.
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Max C. Funck, Sebastian Eilzer, Björn Wedel, "Ultra-short pulse fiber beam delivery in micromachining applications", Proc. SPIE 10519, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII, 105190A (20 February 2018); doi: 10.1117/12.2298398; https://doi.org/10.1117/12.2298398
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