We focus on properties which are expected to be of use in flexible electronics and chemical sensing device applications. First, we demonstrate the process for inducing crystallinity from the amorphous phase and reducing the layer thickness down to the regime of several monolayers. Second, we measure electrical conductivity using both pure sputtered MoS2 films and films co-sputtered with small amount of gold (<20%). Third, we measure the wettability of the processed surface, as measured by droplet contact angle. The measurements compare the properties under different processing conditions.
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J. K. Wuenschell, J. R. Lince, A. Payton, H. Helvajian, "Controlling properties of few-layer MoS2 with a multi-laser process scheme," Proc. SPIE 10519, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII, 105190L (16 February 2018);