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14 March 2018 Simple fabrication of semiconductor microspheres by laser ablation in air (Conference Presentation)
Daisuke Nakamura, Ryohei Tasaki, Yuichiro Wakiyama, Sho Kawagoe, Hiroki Oshima, Mitsuhiro Hiashihata, Nilesh J. Vasa, Hiroshi Ikenoue
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Proceedings Volume 10519, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII; 1051914 (2018) https://doi.org/10.1117/12.2291401
Event: SPIE LASE, 2018, San Francisco, California, United States
Abstract
We have succeeded in synthesizing zinc oxide (ZnO) microspherical crystals and Silicon microspheres by a simple laser ablation technique in air, and demonstrated whispering-gallery-mode (WGM) lasing from optically-pumped ZnO microsphere. ZnO/MgO alloy microspheres were also successfully fabricated, and blue-shift of WGM lasing wavelength was achieved. Recently, size-controlled and on-demand fabrication of semiconductor microspheres by introducing of an optical vortex beam.
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Daisuke Nakamura, Ryohei Tasaki, Yuichiro Wakiyama, Sho Kawagoe, Hiroki Oshima, Mitsuhiro Hiashihata, Nilesh J. Vasa, and Hiroshi Ikenoue "Simple fabrication of semiconductor microspheres by laser ablation in air (Conference Presentation)", Proc. SPIE 10519, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII, 1051914 (14 March 2018); https://doi.org/10.1117/12.2291401
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KEYWORDS
Laser ablation
Zinc oxide
Optical vortices
Semiconductor lasers
Semiconductors
Beam shaping
Crystals
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