Simultaneous measurement of surface profile and thickness variation of transparent parallel plate using wavelength tuning Fizeau interferometer

Yangjin Kim; Naohiko Sugita; Mamoru Mitsuishi

doi:10.1117/12.2287641

16 February 2018 Simultaneous measurement of surface profile and thickness variation of transparent parallel plate using wavelength tuning Fizeau interferometer

Yangjin Kim, Naohiko Sugita, Mamoru Mitsuishi

Author Affiliations +

Proceedings Volume 10519, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII; 105191D (2018) https://doi.org/10.1117/12.2287641
Event: SPIE LASE, 2018, San Francisco, California, United States

Abstract

In this study, a 6N – 5 phase shifting algorithm comprising a polynomial window function and discrete Fourier transform is developed for the simultaneous measurement of the surface shape and optical thickness of a transparent plate. The characteristics of the 6N – 5 algorithm were estimated by connection with the Fourier representation. The phase error of the measurements performed using the 6N – 5 algorithm is discussed and compared with those of measurements obtained using other algorithms. Finally, the surface shape and optical thickness of a transparent plate were measured simultaneously using the 6N – 5 algorithm and a wavelength tuning interferometer.

Citation Download Citation

Yangjin Kim, Naohiko Sugita, and Mamoru Mitsuishi "Simultaneous measurement of surface profile and thickness variation of transparent parallel plate using wavelength tuning Fizeau interferometer", Proc. SPIE 10519, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII, 105191D (16 February 2018); https://doi.org/10.1117/12.2287641

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