16 February 2018 Simultaneous measurement of surface profile and thickness variation of transparent parallel plate using wavelength tuning Fizeau interferometer
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Abstract
In this study, a 6N – 5 phase shifting algorithm comprising a polynomial window function and discrete Fourier transform is developed for the simultaneous measurement of the surface shape and optical thickness of a transparent plate. The characteristics of the 6N – 5 algorithm were estimated by connection with the Fourier representation. The phase error of the measurements performed using the 6N – 5 algorithm is discussed and compared with those of measurements obtained using other algorithms. Finally, the surface shape and optical thickness of a transparent plate were measured simultaneously using the 6N – 5 algorithm and a wavelength tuning interferometer.
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Yangjin Kim, Yangjin Kim, Naohiko Sugita, Naohiko Sugita, Mamoru Mitsuishi, Mamoru Mitsuishi, } "Simultaneous measurement of surface profile and thickness variation of transparent parallel plate using wavelength tuning Fizeau interferometer", Proc. SPIE 10519, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII, 105191D (16 February 2018); doi: 10.1117/12.2287641; https://doi.org/10.1117/12.2287641
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