6 May 1989 Collimation Of Diode Laser Arrays Using Etched Cylindrical Computer-Generated Holographic Lenses
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Abstract
This paper describes the fabrication of computer-generated holographic lenses in fused silica; the lenses are designed to collimate the output beams of diode lasers. The lenses are cylindrical to collimate the beams in one direction at a time and to maximize the fill factor in the laser array. The lens patterns were written into resist on the substrate using an electron beam. The lenses were transferred to the fused silica substrate via reactive ion etching. Two layers of etching were demonstrated.
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J. Michael Finlan, Kevin M. Flood, "Collimation Of Diode Laser Arrays Using Etched Cylindrical Computer-Generated Holographic Lenses", Proc. SPIE 1052, Holographic Optics: Optically and Computer Generated, (6 May 1989); doi: 10.1117/12.951504; https://doi.org/10.1117/12.951504
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