New fast galvo scanner head for high throughput micromachining

G. Mincuzzi; A. Rebière; J. Lopez; M. Faucon; R. Kling

doi:10.1117/12.2289739

19 February 2018 New fast galvo scanner head for high throughput micromachining

G. Mincuzzi, A. Rebière, J. Lopez, M. Faucon, R. Kling

Proceedings Volume 10520, Laser-based Micro- and Nanoprocessing XII; 105200X (2018) https://doi.org/10.1117/12.2289739
Event: SPIE LASE, 2018, San Francisco, California, United States

Abstract

Femtosecond lasers have been proved to be an effective fabrication tool to process with high machining quality and negligible thermal effects a wide variety of materials. However, the system technology enabling fast and precise scanning on the workpiece, currently limits the average power of these laser sources to less than 10 Watts of average power in most industrial application. To overcome this limitation, a proportional up-scaling of both, the laser repetition rate and scan speed is needed, demanding for faster scanning technologies. Recently, rugged, femtosecond lasers delivering pulses with repetition rates of several MHz and pulse energy up to some hundreds of μJ have been introduced to the market. In parallel, the development and commercialization of novel galvanometric scanner heads, enabling scan speeds well above 10 m/s is ongoing. Here we explored the capabilities of a novel set-up consisting of an industrial femtosecond laser delivering 100 W with a repetition rate up to 13 MHz coupled with an innovative galvanometric scanner head enabling scan speeds up to 30 m·s^-1. On stainless steel, we carried out engraving tests with both single line grooving and multiple surface raster scanning. By systematic variation of repetition rate and pules overlap we investigate how the machining quality and the ablation rate depend on the average laser power at different fluence levels. Heat accumulation effects are evaluated via Scanning Electron Microscope. Finally, we show how to scale-up the cutting of a 500 μm thick stainless-steel part varying the scan speed from 1 m·s^-1 to 20 m·s^-1.

Conference Presentation

Citation Download Citation

G. Mincuzzi, A. Rebière, J. Lopez, M. Faucon, and R. Kling "New fast galvo scanner head for high throughput micromachining", Proc. SPIE 10520, Laser-based Micro- and Nanoprocessing XII, 105200X (19 February 2018); https://doi.org/10.1117/12.2289739

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available